Abstract: Vibration sensors require a high sensitivity; however the fabrication process is limited by minimum gap size due to design rules. FhG ENAS and X-FAB MEMS Foundry GmbH report on a capacitive ...
Abstract: Taking advantage of the superiority of valve controlled electro-hydraulic excitation system with wide vibration frequency and adjustable amplitude, a rotary valve controlled ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback